Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Accuracy Environmental Measure Technology
Seiji MATSUBARA, Masayoshi SAKUMA
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Keywords: equipment, precision apparatus, installation environment, temperature, pressure, air pulsation, vibration, control technology
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2002 Volume 68 Issue 9 Pages 1164-1170

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