Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Micro Machining and Nano Probe
Takahito ONO, Masayoshi ESASHI
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Keywords: micro-electro-mechanical system (MEMS), near-field scanning optical microscopy (NSOM), scanning probe microscopy (SPM), micro-heater, carbon nanotubes, microactuator
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2003 Volume 69 Issue 2 Pages 166-169

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