Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Millions of Cantilevers and Atomic Force Microscopy up to 100 MHz
Hideki KAWAKASTU
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Keywords: atomic force microscopy, force detection, mass detection, scanning probe microscopy, sensor
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2003 Volume 69 Issue 2 Pages 178-182

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