Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Microforming
Key Technology for the Age of China Shift
Ryutaro MAEDA
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Keywords: commercialization of MEMS, high aspect ratio sturcturing, hot embossing, LIGA, dry etching, optical MEMS
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2003 Volume 69 Issue 8 Pages 1061-1064

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