Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Mechanical Lithography-State of the Art and the Future
Ryutaro MAEDA, Kiwamu ASHIDA
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Keywords: mechanical lithography, SPM, cantilever array, nanoimprinting
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2004 Volume 70 Issue 10 Pages 1219-1222

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