Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Micro Fabrication by Ion Beam
Hisato OGISO, Shizuka NAKANO
Author information
Keywords: ion beam, micro fabrication, focused ion beam, lithography, sputtering
JOURNAL FREE ACCESS

2004 Volume 70 Issue 12 Pages 1473-1476

Details
Download PDF (6896K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© by The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Journal of the Japan Society of Precision Engineering

Journal of the Japan Society for Precision Engineering, Contributed Papers

Share this page
feedback
 Top