Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Nanometer-scale Fabrications using Micropipette Probe Techniques
Futoshi IWATA
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Keywords: SPM, AFM, fabrication, modification, lithography, micropipette, plating, polymer, Shear force, micromachine
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2005 Volume 71 Issue 3 Pages 307-310

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