Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Linear Motor Drive Ultra Precision Machine using Ceramic made Aerostatic Guideway
Kazuo NAKAMOTO
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Keywords: ultra-precision machine, linear motor, aerostatic guideway, 5-axis machining, nano technology, frictionless motion, alumina ceramics
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2006 Volume 72 Issue 4 Pages 427-430

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