Abstract
Diffusion phenomena and lattice defects in ceramics are discussed. The properties of ceramics are classified broadly into tow groups, one is that the properties are controlled by crystal structure and composition, called "intrinsic" properties. The other is that properties are affected by lattice defects and/or impurities, called "extrinsic". We commonly used the later properties of functional ceramics such as electorceramics. Electrical conductivities and optical emission properties are typical examples. We characterized impurities and diffusion properties in oxides ceramics, using a secondary ion mass spectroscopy (SIMS). By comparing diffusion coefficients and some properties, we identified the original defects governing the properties. The oxygen diffusion coefficients of thin films were also evaluated, and the concerned defects was shown to be in metastable.
