Abstract
BiFe1-xAlxO3 thin films with rhombohedral (R3c), monoclinic (Cm) and tetragonal (T)-like symmetry were obtained by the chemical solution deposition (CSD) and rapid thermal annealing (RTA). The T-like phase is formed under high temperature and high Al concentration. While the Cm phase is stable in the region of low temperature and high Al concentration. The phase transition is suggested to be arisen from strain induced in the film formation.