Abstract
The integration of InSb thin film with a ferrite substrate and ferrite chip to form high-sensitivity thin-film Hall elements for use as a magnetic sensor inside a very small plastic package led to a vast array of commercial applications. Hall elements have a magnetic field sensitivity about 3–6 times that obtained using InSb thin film alone. They have been used to develop many kinds of very small DC brushless, or Hall, motors and have been applied to many key devices such as contactless sensors, switches, current sensors, and many kinds of home-use electrical systems and car sensors. More than 24 billion Hall elements with the ferrite sandwich structure have been fabricated and applied over the last 30 years.