High-speed Deposition of CaO-Rich Calcium Titanate Film by Laser CVD and its Change in MICROSTRUCTURE by Immersion in Simulated Body Fluid

Abstract

Calcium titanate (CaTiO₃) and CaO-rich calcium titanate compound films were prepared by laser chemical vapor deposition (CVD), and the change in morphology by immersion in simulated body fluid was investigated. At the Ca/Ti supplying ratio (R_Ca/Ti) of 0.9 and the laser powder (P_L) of 60 W, CaTiO₃ film having pyramidal facets in a cone-like morphology was deposited, whereas at R_Ca/Ti = 1.6 and P_L = 60 W, Ca-rich calcium titanate compound film with a cauliflower-like morphology was formed at the deposition rate of 225 μm h⁻¹. By immersion in Hanks’ solution for 259.2 ks, the Ca-rich calcium titanate compound film exhibited the significant formation of calcium phosphate granules covering the film surface, while a small amount of calcium phosphate precipitates was partially formed on the CaTiO₃ film surface.