Development of Damage-free Figuring and Finishing Techniques for Ceramics Materials by Utilizing Reactive Plasma

Abstract

We are developing plasma nanoManufacturing process based on atmospheric pressure plasma process. This process consists of plasma CVM technique for shape creation and plasma-assisted polishing technique for surface finishing, and it makes it possible to create an arbitrary shape with nanometer order shape accuracy without forming subsurface damage. In this article, we introduce the outline of plasma nanoManufacturing process and some results.