Process Exploration of Preparing Uniformly Composed Mo Alloy Sputtering Target via Hot Isostatic Pressing

Abstract

Mo-Ni-Ti alloy sputtering target samples were prepared using Mo powder and Ni-Ti alloy powder as raw materials by hot isostatic pressing. Density, phase composition, microstructure and element distribution of Mo-Ni-Ti sputtered target samples were measured by OM, SEM and EDS. The experimental results show that hot isostatic pressing can prepare large-sized Mo alloy target at lower temperature, and the obtained samples have finer grains, higher density and more uniform element distribution than that of non-pressure sintering. In this work, Mo-Ni-Ti sputtering targets (Purity>99.95%, density>99.5%, particle size<100 μm, component deviation<0.5 wt%) were obtained by hot isostatic pressing.