Application of Plasma Jet for the Preparation of Ultrafine Silicon Carbide Powders by Vapor Phase Reaction

Abstract

Highly crystalline and ultrafine SiC powders with particle sizes of -0.02 μ were obtained with a high yield by the vapor phase reaction of CH₃SiCl₃-H₂ system in a simple plasma jet reactor. The formation of SiC powders from CH₃SiCl₃-N₂ system was difficult by the same method.