Ion Beam Application on Materials Modification

Abstract

Ion beam application on solid materials modification are reported. Two effects of ion beam, i.e., introduction of defects and excess atoms, are described with examples of ion implantation to semiconductors, superconductors and new high Tc superconductors.
Ion implantation of oxygen to high Tc superconductors such as YBa₂Cu₃O_7-x, followed by thermal annealing at 900-950°C, was demonstrated to be performed without losing high Tc superconducting characteristics up to a dose of 1×10¹⁷/cm² which adds the amount of about one excess oxygen to YBa₂Cu₃O_7-x.