Improvement of The Tribological Properties of Ceramics by Si Film Deposition and Ion Irradiation

Abstract

Masao Kohzaki, Shoji Noda. Haruo Doi and Osami Kamigaito : Improvement of The Tribological Properties of Ceramics by Si Film Deposition and Ion Irradiation.
We studied the tribological properties of surface modified SiC ceramics with a pin-on-disk friction and wear tester in an ambient atmosphere without oil lubrication. The friction coefficient between Si film deposited SiC(Si/SiC) and a diamond pin was about 0.05, which was smaller than one half of that between SiC and a diamond pin. The low friction state of Si/SiC lasted for 40 hours when the Si/SiC was irradiated with Ar⁺ ions. Ar⁺ ion irradiation was also effective for reducing the wear. Effectively no wear was detected in Si/SiC irradiated to the dose over 5 × 10¹⁵ ions/cm².