Characterization of Superconducting Oxide Thin Films by X-ray Diffraction

Abstract

We examined the structures of (110) preferred oriented YBa₂Cu₃O_y thin films by X-ray diffractometry with a 4-axis goniometer. It is noted that some films, in which the RHEED method had detected only the (110) domain, had (103) domains. The results indicate that the films have different structures between their surface and inside. So to characterize the precise structure of the films, this X-ray diffraction method is very useful.