Abstract
Magnetic and mechanical properties of sputtered FeA1Si films were investigated. High saturation flux density (Bs) of 14-15kG was obtained for films of 4.5-6wt%Al-5-6.5wt%Si-balance of Fe with soft magnetic properties. From the results of annealing temperature dependence of soft magnetic properties and internal stress (σ) of films, an optimum annealing temperature for superior soft magnetic properties and low σ was 600°C. There was little decrease in permeability of Mn-Zn ferrite on which the film deposited.
