Abstract
High purity β-SiC films were coated on C1/SiC composite by a chemical vapor deposition method using SiCl4, C3H8 and H2 as source gases under following conditions ; deposition temperature 1000-1500°C, total gas pressure 103-105 Pa. Oxidizing resistance of β-SiC films was measured by oxidizing test under following conditions;temperature 1450°C, keeping time 100 hr in oxidizing atomosphere. The β-SiC coated C1/SiC composite showed high oxdizing resistance and the weight loss of the composite after oxdizing test were 2mg/cm2.
The flexural strength of the composite after oxdizing test depended on the thickness of SiC coating film, and the composite with the film thickness of 50μm showed the highest flexural strength.
