Influence of MgO and CaO Substrates on the Structure of Reactively Evaporated IN₂O₃

Abstract

Indium oxide films were reactively deposited on MgO and CaO films at substrate temperatures of 25-100°C. The influence of the MgO and CaO substrates on the film structure and the physical properties was investigated. The Crystallinity of the films was much improved on the CaO substrates at 100°C, although an amorphous phase was still contained in the films to some degree. With improvement of the crystallinity, the light transmittance of the films was increased. At 60°C, the effect of the CaO sub-strates on the film structure was very small. The MgO substrates had little effect on the growth of crystalline films.