Synthesis of Oxide Fine Particles Induced by Ion Implantation into Glass and Sapphire

Abstract

Using double ion species implantation of metal and oxygen ions, we have examined the possibility of synthesis of metal-oxide fine particles in glass or sapphire surface. Characteristics of ion implanted silica glass and sapphire were examined by RBS, XRD and optical (absorption and photo-luminescence) measurements. 1.8 MeV 1×10¹⁷ Cu⁺/cm² implantation into silica glass and a successive heat treatment of 1000°, 1h in the air can make Cu fine particles. 1.8 MeV 1×10¹⁷ Cu⁺/cm² and 1.0 MeV 1×10¹⁷ O⁺/cm² implantation into silica glass and the successive heat treatment can synthesis Cu₂O fine particles of about 8 nm in radius. 1.8 MeV 5×10¹⁶ Ti⁺/cm² and 1.0 MeV 1×10¹⁷ O⁺/cm² into sapphire and the successive heat treatment can synthesis Ti0₂ fine particles of about 10 nm in radius. The TiO₂ particles were rutile-type with (200) orientation, which may be related to the (0001) orientation of sapphire substrate. Luminescence from defects in sapphire substrate was observed, but luminescence from the particles could not be detected.