Abstract
MnZn ferrite thin films were prepared on quartz substrate buffered by ZnO under layer by r.f. magnetron-sputtering method. ZnO under layer film was formed as preferentially (001) oriented film in any thickness. When as-deposited Mn-Zn-Fe oxide films on ZnO under layer were annealed in reduced atmosphere at 800°C for 5 hours, single phase of spinel-type ferrite was formed. The films were preferentially crystal-oriented to [111] direction normal to the film. The thinner ZnO under layer successfully induced the (111) orientation in plane because of good lattice matching between ZnO and spinel phase. The film of Mn:Zn:Fe=23:9:68 composition had the value of saturation magnetization of 410 emu/cc. The relationship between composition and magnetization of the films was similar to that of the bulks. The (111) oriented films are expected to have high permeability and prominent frequency characteristics.
