Abstract
We have newly developed the high-speed response optical shutter composed of Al plane electrodes on a (Pb, La)(Zr, Ti)O3(PLZT) substrate. The surface-reduction-treatment for the PLZT substrate, which included sputtering Al film on the substrate, annealing them in N2 atmosphere, finally removing off the Al film, was found to improve the optical shutter performance under continuous driving. For the shutter using the surface-reduction-treated substrate, optical leakage in a shutter-off-state remained small after continuous driving. The surface resistance of the PLZT substrate decreased 5 orders of magnitude by the surface-reduction-treatment. The decreasing resistance of the surface can reduce concentration of electric field near the edges of electrodes, resulting in improving performance of the PLZT optical shutter.
