Preparation and Application to Enzyme Sensor of Temperature-sensitive Metal Oxide Semiconductor Thin Film

Abstract

An approach to biochemistry of the technology on the powder metallurgy has been advanced and various biosensors have been developed. The temperature-sensitive metal oxide semiconductor thin film, TMT is prepared via process of the vacuum deposition of the transition metals and subsequent annealing treatment. The marked temperature dependent TMT has the function of detecting the minute temperature of 10-3°C in degree, so it can be used for the thermal enzyme sensor. The paper describes preparation of the TMT and the sensor system for discriminating various chemical substances by minute heat generated with an enzyme reaction.