Preparation and Properties of the Micro-Sized Wires and Dots of the Perovskite-Type Manganese Oxides

Abstract

Wires and dots of the perovskite-type manganese oxides with the dimension of micrometer were experimentally fabricated by the electron-beam lithography method and Ar-ion dry etching of those oxide thin films. The La_0.7Sr_0.3MnO₃ thin films were prepared by the pulsed laser deposition (PLD) method with a KrF excimer laser. The wire of 1μm width showed a larger magnetoresistance than that of the thin film. Definite magnetic force microscope (MFM) images revealing movement of the domain structure were observed for the 2×2 μm square dots under an applied in-plane magnetic field.