2004 Volume 51 Issue 3 Pages 184-189
Inductors with a Ni-Zn ferrite thin-film prepared by reactive ECR sputtering as a lower magnetic core and a Ni-Zn-Cu ferrite over coat layer as a upper magnetic core was designed using high frequency electromagnetic simulation based on FEM and fabricated in trial. The fabricated inductor with upper and lower magnetic cores showed higher inductance by about 25% than the inductor without magnetic core as predicted by simulation. High inductance value of the inductor with upper and lower magnetic cores was maintained up to high frequency of 1 GHz showing the effectiveness of the ferrite layers.
