Abstract
New measurement methods to determine the thermal diffusivity of thin films without measuring heat characteristics for substrates have been proposed in this paper. We propose two kinds of methods for the measurement of thermal diffusivity of thin film: one for thin film that is placed in contact with front surface of substrate, and the other for thin film that is placed in contact with rear surface of substrate. lt was confirmed that measurement values agreed with reported values within range of error of thickness measurement for thin films.
