Thermal conductivity of DLC Films deposited from methane and acetylene by RF plasma enhanced CVD

Abstract

The thermal conductivity of diamond-like carbon (DLC) films prepared by RF plasma enhanced CVD were investigated by 3ω method. With the results of Raman spectroscopy and Rutherford Back Scattering / Elastic Recoil Detection Analysis (RBS/ERDA), the influence of amorphousness and density on the thermal conductivity of DLC film was discussed. DLC films from methane showed no obvious dependence on density. On the other hand, depending on deposition condition, DLC films with low amorphousness from acetylene showed dependence on density, while DLC films with high amorphousness from acetylene did not show such dependence on density.