Journal of Jpan Laser Processing Society
Online ISSN : 2435-9181
Print ISSN : 1881-6797
Topics of New Technologies
Laser Slicing of GaN Substrates and GaN Devices
Atsushi TANAKA
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Keywords: GaN, gallium nitride, wafer, substrate, laser slice
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2023 Volume 30 Issue 2 Pages 41-43

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