Abstract
A vacuum ultraviolet (VUV) emission spectroscopy was carried out to determine carbon monoxide (CO) gas discharge. The intensive emission lines in the VUV range were assigned as a “4th positive group”. The results showed that the VUV intensity increased as the pressure decreased even though the input power was reduced. During the test, the stability of the discharge and the precipitation of carbon contamination were examined. The carbon contamination was insignificant at the lower gas pressures. The reaction of CO molecules in the discharge will be discussed in this paper.
