Abstract
Permalloy films of about 350Å thickness evaporated on SiO2 and Ti films were annealed in a vacuum of 5 × 10-6 Torr at 250°C. The selective oxidation of Fe was confirmed by both IMA and EPMA measurements for the films prepared on the SiO2 film, but not on the Ti film. The oxidation causes the increase of coercive force. Further, Permalloy films were evaporated or sputtered on the Ti films which were prepared on glass substrates having a different surface roughness. The coercive force increased markedly with the increase of surface roughness for the evaporated films but not for the sputtered films.
