Abstract
This paper reports the relation between composition and characteristics of Co-Cr films prepared by DC magnetron sputtering. The composition of Co-Cr films can be controlled by changing the magnetic flux from magnet and solenoid coils. In films of high Cr content, a good orientation of c-axis and small in-plane squareness are obtained, while perpendicular coercivity and saturation magnetization are small. In-plane M-H loop of a Co-30 at.%Cr film shows that the film has large perpendicular anisotropy from the initial layer.
