Abstract
Stress was calculated using the three dimensional finite element method. There are two kinds of stress, thermal and intrinsic. Intrinsic stress was equivalently treated as a thermal stress using modified thermal expansion coefficients. Modified values of films were selected to fit the calculated displacements to the measured ones for circular substrates with a deposited layer. The accuracy of calculations was within 20% of measurements, and the stress distribution around the backgap qualitatively corresponded to the domain structure observed by spinpolarized SEM. It was found that the tensile stress along the hard axis was dominant in the pole tip region. The dependence of magnetic anisotropy on magnetostriction constants was calculated using the obtained stress. Suitable magnetostriction constants for bottom yoke were found to be smaller than those for top yoke.
