1991 Volume 15 Issue S_1_MORIS_91 Pages S1_385-388
The effect of surface topographical evolution of sputtering target on the temporal variation of deposited film composition was investigated for a cast target composed of different intermetallic phases and for a sintered target composed of pure metallic phases as well as intermetallic compound. For a cast target, the preferential sputtering of Tb and selective erosion of Tb (Fe,Co)2 phase were found to give the film composition variation. For a sintered target, it was caused by the selective erosion of Tb metallic phase compared to Fe-Co metallic phase. The angular distributions of sputtered atoms were measured. In a cast target, Fe and Co showed nearly cosine distribution and Tb showed undercosine distribution. In a sintered target, Tb, Fe, and Co all showed undercosine distribution.
