Journal of the Magnetics Society of Japan
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
Magnetic Thin Films
Soft Magnetic Properties of Nanocrystalline Fe-Ceramic Films
S. Furukawa, S. Ohnuma, F. Matsumoto, H. Fujimori, T. Masumoto
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Keywords: Soft magnetic film, high resistivity, ceramic, granular, low magnetostriction, nanocrystalline
JOURNAL OPEN ACCESS

1994 Volume 18 Issue 2 Pages 271-276

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Abstract
Fe-M-(O, F) (M=Si, Mg, Y, Zr, Ca, Al) films were prepared by co-sputtering of Fe and ceramic targets. These films have a network-like structure composed of metallic fine grains with a diameter of about 50∼100Å and ceramic-like boundaries. Those films that consist of bcc-Fe grains have soft magnetic properties and low magnetostriction in the as-deposited state. Their permeability has a good frequency response, which seems to be attributable to the reduction of eddy current losses by the highly resistive boundaries.
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© 1994 by The Magnetics Society of Japan
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