Effect of Oxygen Introduction on the Magnetic Propertiesof Co-Cr Film Deposited at Room Temperature

Abstract

The effect of introducing oxygen into the deposition gas on Co-Cr film was investigated in a room temperature deposition method. When oxygen was added to Ar gas, the grain size of Co-Cr became small. As a result, the perpen- dicular coercivity of Co-Cr films was increased by the introduction of a small amount of oxygen into the Ar gas. Introduction of air into the gas was found to be even more effective than introduction of oxygen. However, too much oxygen or air degraded the perpendicular anisotropy and led to a decrease in coercivity.