Magnetic Properties of Fe-Pt Sputtered Thick Film Magnet

Abstract

Sputtering conditions are investigated in order to deposit Fe-Pt thick film magnet. Argon pressure, input power, and target-substrate distance are determined to obtain a high maximum energy product film. Under the conditions, a film of 129μm thickness with a maximum energy product of 104 kJ/m³ (13.1 MGOe) is obtained. Examination of the microstructure indicates that the small grain size gives a better coercive force than that of bulk material. The obtained magnetic properties are considered to be sufficient for certain applications of micro-machines.