1996 Volume 20 Issue 2 Pages 53-56
Cobalt ferrite films with perpendicular magnetic anisotropy were prepared by facing-targets sputtering, and their magnetic properties and structure were investigated. A film deposited at Po2=0 mTorr and post-annealed at 300°C had Hc⊥ = 1.5 kOe, Hcr=3.5, and Sq⊥=0.46. The film deposited at Po2=0 mTorr and post-annealed at 300°C had outstanding squareness ratio (Sq⊥) compared with that of a CoFe2O4 single-phase film. When the binding energies of the Co2p and Fe2p electrons of the film were measured by XPS, the film was found to be made up of a (CoFe2O4)-(Co-CoO) composite.