Possibility of Sensitive Magnetic Thin-Film Sensor Using LC Resonance

Abstract

This paper reports the performance of a LC resonant magnetic thin-film sensor. The impedance of the sensor changes according to the magnetic field dependence of the permeability and LC resonance of the sensor at high frequencies. To obtain high sensitivity, the conductor layer was covered with insulating layers and magnetic layers. As a result, a large impedance change of 105% was achieved.