Abstract
This paper reports an analysis of the high-frequency impedance of micromachined soft-magnetic thin films. The impedance changes according to the directions of the easy axis orientation and the dc magnetic field to be sensed. Investigation of CoZrNb films clarified that the change in permeability with the applied dc magnetic field can be explained by the bias susceptibility theory. Moreover, the change in the impedance of micromachined films can be estimated quantitatively on the basis of the dc field dependence of the permeability.
