Abstract
Air core spiral thin film inductors have been widely studied because they can be used in high frequency range in spite of low inductance. However, conventional spiral thin film inductors have a connection bridge to bias current to inductor's inner end which causes stray capacitance and extra resistance. In order to overcome this problem, we proposed a new type double spiral thin film inductor, which has no connection bridge. The inductance of the proposed inductor is about 14 nH up to 100 MHz. And the quality factor is 2.3 at 100 MHz.
