Effect of the Target Composition on the Crystallization and Magnetic Properties of Barium Ferrite Thin Films

Abstract

Barium ferrite (BaM) thin films were prepared by facing-targets sputtering with several kinds of target compositions and their magnetic and crystallographic properties were studied. It was found that the temperature of BaM films to be crystallized with a stoichiometric target composition (i. e. Fe₂/Ba = 6) was around 500 °C , and that of those with target compositions of 5.5 and 5 was around 525 and 550 °C, respectively.