Journal of the Magnetics Society of Japan
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
Power Magnetics
New Cutting Method of Single Crystal Silicon Using a Pulsed Magnetic Field
H. KanekoK. OhashiY. TawaraT. HaruyamaN. Miura
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JOURNAL OPEN ACCESS

1999 Volume 23 Issue 4_2 Pages 1477-1480

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Abstract
A new cutting method using a pulsed magnetic field has been studied Apiece of single-crystal silicon is wound with a secondary coil, and is placed in a primary coil. When a current flows in the primary coil, the secondary coil shrinks in the radial direction. We succeeded in cutting the piece of single-crystal silicon using that stress. The smaller the electric resistance of the coil, the larger the stress. The cross-section of a silicon crystal cut by thus method has small radiant steps.
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© 1999 by The Magnetics Society of Japan
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