Fabrication of a Perpendicular/Longitudinal Composite Medium by Sputtering

Abstract

Perpendicular/longitudinal composite media were fabricated by sputtering. It is hard to deposit a perpendicular upper layer on a longitudinal underlayer because of the epitaxy between the layers. Therefore, it is important to prevent the epitaxial growth between the perpendicular upper layer and the longitudinal underlayer. For this purpose, we attempted to apply an amorphous carbon interlayer. First, the magnetic properties of perpendicular single media with Ti-Cr and C underlayers were compared. As a result, it was found that a perpendicular single medium with a C underiayer had the same property as a medium with a Ti-Cr underlayer. In accordance with these results, a perpendicular layer was deposited onto a longitudinal layer with a C interlayer. Consequently, the thickness of the C interlayer was optimized. As a result, a perpendicular/longitudinal composite medium was successfully fabricated using 5-nm C interlayer.