Abstract
A study was made of the structure, composition, and properties of (Fe-Co)-M-O (M= Al, Zr, Mg) based films prepared by rf magnetron reactive sputtering in an atmosphere of O2+Ar. Soft magnetic films with both a high saturation induction (Bs > 20 kG) and electrical resistivity (ρ > 100 μΩcm) are obtained in (Fe1-XCoX)Y (M-O)100-Y (X = 0.1, 0.2; Y = 80-90; M=Al, Zr) films, where the grain is around 20 nm in diameter and strongly faces (110) crystal direction. They exhibit not only high Bs and ρ, but also a moderate magnitude of anisotropy field (Hk = 10-20 Oe). It follows that these films demonstrate an excellent frequency response of permeability.
