GHz-drive Magnetic Thin-film Inductor Using CoNbZr Film

Abstract

Thin-film inductors with micro-patterned CoNbZr films for impedance-matching elements in a 1-GHz-drive mobile communication handsets application have been demonstrated for the first time. Narrow slit trains along the easy axis direction and a square spiral coil control the ferromagnetic resonance frequency through changes in shape anisotropy energy and magnetostatic energy. Inductance increased by 18% compared with the air core inductor, while Q was almost the same.