Abstract
We studied linear compensation and precision control of nonlinear hysteric piezoelectric actuators using a highly magnetostrictive amorphous FeCoSiB film pattern as a strain sensor. The elements had a hybrid structure in which thin silicon substrates with the magnetostrictive films, the strain sensitivity of which was improved by annealing with bias stress, were bonded on PZT piezoelectric substrates. The magnetostrictive film as a strain sensor detects the deflection of the actuator, and a voltage signal from the strain sensor related to a deflection of the actuator is used for control of the actuator. The application of the actuator for control of the head-disk contact properties was demonstrated.
