Fabrication of a Two-Axis Planar Flux Gate Sensor with a Multilayer Structure Composed of a Co-Based Amorphous Magnetic Ribbon and Planar Coils

Abstract

A two-axis flux gate magnetic field sensor, with a multilayer structure composed of a Co-based amorphous magnetic ribbon and planar coils, was developed. Since the two planar spiral coils for ac excitation and flux detection were located on the same plane, it was easy to fabricate by the photo-lithography technique. The fabricated two-axis flux gate functioned as an earth magnetic field direction sensor.