Abstract
NdFeB thin films with perpendicular c-axis orientation texture have been studied as promising candidates for ultrahigh-density recording media because of their high magneto crystalline anisotropy and large saturation magnetization. Films with composition of Nd18Fe76B6 and a thickness of 15 nm exhibited perpendicular coercivity as high as 6.0 kOe. The grain size for this film is about 70 nm, as evaluated by SEM surface images. It was found that an increase in B percentage can decrease the grain size to 20 nm with B content up to 15 at.%. The perpendicular coercivity, nucleation field, and grain size for NdFeB films with 12.3 at.% of B and a thickness of 15 nm are 5 kOe, -2.5 kOe, and about 40 nm, respectively.